Browsing by author "Vurpillot, Francois"
Now showing items 1-4 of 4
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APT analysis of short (~200 nm) Si nanowires embedded in SiO2 and HfO2
Melkonyan, Davit; Fleischmann, Claudia; Veloso, Anabela; Arnoldi, Laurent; Kumar, Arul; Bogdanowicz, Janusz; Vurpillot, Francois; Vandervorst, Wilfried (2016) -
Atom probe tomography analysis of SiGe fins embedded in SiO2: facts and artefacts
Melkonyan, Davit; Fleischmann, Claudia; Arnoldi, Laurent; Demeulemeester, Jelle; Kumar, Arul; Bogdanowicz, Janusz; Vurpillot, Francois; Vandervorst, Wilfried (2017) -
Challenges for APT in advanced semiconductor technology research
Melkonyan, Davit; Fleischmann, Claudia; Bogdanowicz, Janusz; Arnoldi, Laurent; Kumar, Arul; Vurpillot, Francois; Vandervorst, Wilfried (2016) -
Emitter shape evolution during field evaporation and its impact on the reconstructed data of SiGe fins embedded in SiO2
Melkonyan, Davit; Arnoldi, Laurent; Fleischmann, Claudia; Kumar, Arul; Vurpillot, Francois; Bogdanowicz, Janusz; Vandervorst, Wilfried (2016)