Browsing by author "Willson, Grant"
Now showing items 1-6 of 6
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Directed self-assembly of silicon-containing block copolymers for 20nm lithography
Blachut, Gregory; Sirard, Stephen; Maher, Michael; Asano, Yusuke; Someya, Yasunobu; Lane, Austin; Durand, William; Gronheid, Roel; Hymes, Diane; Ellison, Christopher; Willson, Grant (2016) -
Directed self-assembly of silicon-containing block copolymers with a hybrid chemo-/grapho-epitaxial flow
Blachut, Gregory; Sirard, Stephen; Maher, Michael; Asano, Yusuke; Someya, Yasunobu; Lane, Austin; Durand, William; Gronheid, Roel; Hymes, Diane; Ellison, Christopher; Willson, Grant (2016) -
Evolution of roughness during the pattern transfer of high-chi, 10 nm half-pitch, silicon-containing block copolymer structures
Blachut, Gregory; Sirard, Stephen; Liang, Andrew; Mack, Chris; Maher, Michael; Rincon Delgadillo, Paulina; Chan, BT; Mannaert, Geert; Vandenberghe, Geert; Willson, Grant; Ellison, Christopher; Hymes, Diane (2018) -
Fluorinated polymethacrylates as highly sensitive non-chemically amplified e-beam resists
Straham, Jeffrey; Adams, Jacob; Jen, Wei-Lun; Vanleenhove, Anja; Neikirk, Colin; Rochelle, Timothy; Gronheid, Roel; Willson, Grant (2009) -
High chi block copolymers: a progress report
Willson, Grant; Blachut, Greg; Maher, Michael; Durand, William; Asano, Yusuke; Someya, Yasunobu; Gronheid, Roel; Sirard, Stephen; Ganesan, Venkat; Ellison, Christopher (2015) -
Optimizing surface treatments for the directed self-assembly of silicon-containing block copolymers
Blachut, Greg; Siarard, Stephen; Maher, Michael; Asano, Yusuke; Someya, Yasunobu; Lane, Austin; Durand, William; Gronheid, Roel; Hymes, Diane; Ellison, Christopher; Willson, Grant (2016)