Authors

Blachut, Gregory; Sirard, Stephen; Liang, Andrew; Mack, Chris; Maher, Michael; Rincon Delgadillo, Paulina; Chan, BT; Mannaert, Geert; Vandenberghe, Geert; Willson, Grant; Ellison, Christopher; Hymes, Diane

Conference

Advanced Etch Technology for Nanopatterning VII

Title

Evolution of roughness during the pattern transfer of high-chi, 10 nm half-pitch, silicon-containing block copolymer structures

Publication type

Proceedings paper

Embargo date

9999-12-31