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Evolution of roughness during the pattern transfer of high-chi, 10 nm half-pitch, silicon-containing block copolymer structures

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2002 since deposited on 2021-10-25
1last month
Acq. date: 2026-04-26

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2002 since deposited on 2021-10-25
1last month
Acq. date: 2026-04-26

Citations