Browsing by author "Armour, D."

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Cluster formation during annealing of ultra-low-energy boron-implanted silicon

Collart, E. J. H.; Murrell, A. J.; Foad, M. A.; van den Berg, J. A.; Zhang, S.; Armour, D.; Goldberg, R. D.; Wang, T. S.; Cullis, A. G.; Clarysse, Trudo; Vandervorst, Wilfried (2000)