Browsing by author "Tung, C. Maryann"
Now showing items 1-3 of 3
-
Design method for the integration of DSA via patterning in sub-7 nm circuits
Karageorgos, Ioannis; Ryckaert, Julien; Croes, Kris; Tung, C. Maryann; Wong, H. -S. Philip; Karageorgos, Evangelos; Gronheid, Roel; Bekaert, Joost; Vandenberghe, Geert; Stucchi, Michele; Dehaene, Wim (2016) -
Design strategy for integrating DSA via patterning in sub-7 nm interconnects
Karageorgos, Ioannis; Ryckaert, Julien; Tung, C. Maryann; Wong, H.-S. Philip; Gronheid, Roel; Bekaert, Joost; Croes, Kris; Karageorgos, Evangelos; Vandenberghe, Geert; Stucchi, Michele; Dehaene, Wim (2016) -
Design strategy for layout of Sub-Resolution Directed Self-Assembly Assist Features (SDRAFs)
Tung, C. Maryann; Doise, Jan; Karageorgos, Ioannis; Ryckaert, Julien; Wong, H.-S. Philip (2016)