Publication:

Design strategy for integrating DSA via patterning in sub-7 nm interconnects

Date

2016

Proceedings Paper

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Author(s)

Karageorgos, Ioannis

;

Ryckaert, Julien

;

Tung, C. Maryann

;

Wong, H.-S. Philip

;

;

;

;

Karageorgos, Evangelos

;

Vandenberghe, Geert

;

Stucchi, Michele

;

Metrics

1885 since deposited on 2021-10-23

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Acq. date: 2025-12-14