Publication:
Design strategy for integrating DSA via patterning in sub-7 nm interconnects
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1883 since deposited on 2021-10-23
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Acq. date: 2025-10-24
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Views
1883 since deposited on 2021-10-23
401item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations