Browsing by author "Beaven, Peter"
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Grazing incidence X-ray fluorescence spectrometry for compositional analysis of nanometer-thin high-k dielectric HfO2 layers
Hellin, David; Delabie, Annelies; Puurunen, Riikka; Beaven, Peter; Conard, Thierry; Brijs, Bert; De Gendt, Stefan; Vinckier, Chris (2005-07)