Authors

Hellin, David; Delabie, Annelies; Puurunen, Riikka; Beaven, Peter; Conard, Thierry; Brijs, Bert; De Gendt, Stefan; Vinckier, Chris

Issue

7

Journal

Analytical Sciences

Volume

21

Title

Grazing incidence X-ray fluorescence spectrometry for compositional analysis of nanometer-thin high-k dielectric HfO2 layers

Publication type

Journal article