Publication:

Grazing incidence X-ray fluorescence spectrometry for compositional analysis of nanometer-thin high-k dielectric HfO2 layers

Date

2005-07
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorHellin, David
dc.contributor.authorDelabie, Annelies
dc.contributor.authorPuurunen, Riikka
dc.contributor.authorBeaven, Peter
dc.contributor.authorConard, Thierry
dc.contributor.authorBrijs, Bert
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorVinckier, Chris
dc.contributor.imecauthorHellin, David
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-16T01:57:52Z
dc.date.available2021-10-16T01:57:52Z
dc.date.issued2005-07
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10562
dc.source.beginpage845
dc.source.endpage850
dc.source.issue7
dc.source.journalAnalytical Sciences
dc.source.volume21
dc.title

Grazing incidence X-ray fluorescence spectrometry for compositional analysis of nanometer-thin high-k dielectric HfO2 layers

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles