Browsing by author "Sobieski, Daniel"
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Self-aligned-quadruple-patterning for N7/N5 silicon fins
Altamirano Sanchez, Efrain; Tao, Zheng; Gunay Demirkol, Anil; Lorusso, Gian; Hopf, Toby; Everaert, Jean-Luc; Sobieski, Daniel; Ou, Fung Suong; Hellin, David; Clark, William (2016)