Publication:

Self-aligned-quadruple-patterning for N7/N5 silicon fins

Date

2016
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

33285.pdf 703.91 KB

Author(s)

Altamirano Sanchez, Efrain  
;
Tao, Zheng  
;
Gunay Demirkol, Anil
;
Lorusso, Gian  
;
Hopf, Toby  
;
Everaert, Jean-Luc
;
Sobieski, Daniel
;
Ou, Fung Suong
;
Hellin, David  
;
Clark, William

Journal

Abstract

Description

Statistics

Downloads

1 since deposited on 2021-10-23
Acq. date: 2026-02-25

Views

2066 since deposited on 2021-10-23
2last month
Acq. date: 2026-02-25

Citations

Statistics

Downloads

1 since deposited on 2021-10-23
Acq. date: 2026-02-25

Views

2066 since deposited on 2021-10-23
2last month
Acq. date: 2026-02-25

Citations