Publication:
Self-aligned-quadruple-patterning for N7/N5 silicon fins
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Acq. date: 2026-01-26
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Acq. date: 2026-01-26
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1 since deposited on 2021-10-23
Acq. date: 2026-01-26
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2064 since deposited on 2021-10-23
3last month
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Acq. date: 2026-01-26
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