Browsing by author "Vyas, Shashi"

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Vapour phase self-assembled monolayers for ALD blocking on 300 mm wafer scale

Herregods, Sebastiaan; Laurent, Lecordier; Vyas, Shashi; Chan, BT; Delande, Tinne; Hetel, Iulian; Tokei, Zsolt; Struyf, Herbert; Armini, Silvia (2017)