Vapour phase self-assembled monolayers for ALD blocking on 300 mm wafer scale

Thumbnail
View/open
Metadata
Show full item record
Authors
Herregods, Sebastiaan; Laurent, Lecordier; Vyas, Shashi; Chan, BT; Delande, Tinne; Hetel, Iulian; Tokei, Zsolt; Struyf, Herbert; Armini, Silvia
Conference
Joint EuroCVD 21 - Baltic ALD 15
Title
Vapour phase self-assembled monolayers for ALD blocking on 300 mm wafer scale
Publication type
Meeting abstract
Embargo date
9999-12-31
Collections