Publication:

Vapour phase self-assembled monolayers for ALD blocking on 300 mm wafer scale

Date

2017
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorHerregods, Sebastiaan
dc.contributor.authorLaurent, Lecordier
dc.contributor.authorVyas, Shashi
dc.contributor.authorChan, BT
dc.contributor.authorDelande, Tinne
dc.contributor.authorHetel, Iulian
dc.contributor.authorTokei, Zsolt
dc.contributor.authorStruyf, Herbert
dc.contributor.authorArmini, Silvia
dc.contributor.imecauthorHerregods, Sebastiaan
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorDelande, Tinne
dc.contributor.imecauthorHetel, Iulian
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecStruyf, Herbert::0000-0002-6782-5424
dc.date.accessioned2021-10-24T05:38:34Z
dc.date.available2021-10-24T05:38:34Z
dc.date.embargo9999-12-31
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28492
dc.source.conferenceJoint EuroCVD 21 - Baltic ALD 15
dc.source.conferencedate11/06/2017
dc.source.conferencelocationLinköping Sweden
dc.title

Vapour phase self-assembled monolayers for ALD blocking on 300 mm wafer scale

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
35561.pdf
Size:
364.99 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions