Browsing by author "Brown, Ian"
Now showing items 1-3 of 3
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Development of integrated wet cleans for 3D-SIC technologies
Suhard, Samuel; Simms, Ihsan; Brown, Ian; Shogo, Mizota; Koji, Kagawa; Claes, Martine; Buisson, Thibault; Jourdain, Anne; Beyer, Gerald; De Gendt, Stefan (2013) -
UV-induced modification of fluorocarbon polymer for improvement of wet removal
Le, Quoc Toan; Simms, Ihsan; Yue, Henry; Brown, Ian; Kesters, Els; Vereecke, Guy; Struyf, Herbert; De Gendt, Stefan (2014) -
UV-induced modification of fluorocarbon polymer for improvement of wet removal
Le, Quoc Toan; Simms, Ihsan; Yue, Henry; Brown, Ian; Kesters, Els; Struyf, Herbert; De Gendt, Stefan (2012)