UV-induced modification of fluorocarbon polymer for improvement of wet removal

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Authors
Le, Quoc Toan; Simms, Ihsan; Yue, Henry; Brown, Ian; Kesters, Els; Struyf, Herbert; De Gendt, Stefan
Conference
Sematech Surface Preparation and Cleaning Conference - SPCC
Title
UV-induced modification of fluorocarbon polymer for improvement of wet removal
Publication type
Meeting abstract
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