Browsing by author "Mueller, Dieter"
Now showing items 1-2 of 2
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Within-die and within-wafer CMP process characterization and monitoring using PWG Fizeau interferometry system
Teugels, Lieve; Devriendt, Katia; Heylen, Nancy; Tsvetanova, Diana; Struyf, Herbert; Bast, Gerhard; Ramkhalawon, Roshita; Mueller, Dieter; Simpson, Gavin; Ulea, Neli (2016) -
Within-die and within-wafer CMP process characterization and monitoring using PWG Fizeau interferometry system
Teugels, Lieve; Devriendt, Katia; Heylen, Nancy; Tsvetanova, Diana; Struyf, Herbert; Bast, Gerhard; Ramkhalawon, Roshita; Mueller, Dieter; Simpson, Gavin; Ulea, Neli (2016)