Authors

Teugels, Lieve; Devriendt, Katia; Heylen, Nancy; Tsvetanova, Diana; Struyf, Herbert; Bast, Gerhard; Ramkhalawon, Roshita; Mueller, Dieter; Simpson, Gavin; Ulea, Neli

Conference

International Conference on Planarization Technology - ICPT

Title

Within-die and within-wafer CMP process characterization and monitoring using PWG Fizeau interferometry system

Publication type

Meeting abstract