Browsing by author "Piel, J.P."

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Spectroscopic ellipsometry in the VUV range applied to the characterization of atomic layer deposited HfO2,Al2O3 and HfAlOx thin layers for high k dielectrics

Boher, P.; Defranoux, C.; Bourtault, S.; Piel, J.P.; Bender, Hugo (2003)