Browsing by author "Yu, Hong Yu"
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The impact of stacked cap layers on effective work function with HfSiON and SiON gate dielectrics
Cho, Hag-Ju; Yu, Hong Yu; Chang, Vincent S.; Akheyar, Amal; Jakschik, Stefan; Conard, Thierry; Hantschel, Thomas; Delabie, Annelies; Adelmann, Christoph; Van Elshocht, Sven; Ragnarsson, Lars-Ake; Schram, Tom; Absil, Philippe; Biesemans, Serge (2008-07)