Browsing by author "Freed, Regina"
Now showing items 1-2 of 2
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Demonstration of lithography patterns using reflective e-beam direct write
Freed, Regina; Sun, Jeff; Brodie, Alan D.; Petric, Paul; McCord, Marc A.; Ronse, Kurt; Haspeslagh, Luc; Vereecke, Bart (2011) -
Fabrication of a micro-lens array for Reflective Electron Beam Lithography
Vereecke, Bart; Haspeslagh, Luc; Lazzarino, Frederic; Miller, Andy; Kellens, Kristof; Dekkers, Harold; Freed, Regina; Grella, L. (2011)