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Demonstration of lithography patterns using reflective e-beam direct write
Publication:
Demonstration of lithography patterns using reflective e-beam direct write
Date
2011
Proceedings Paper
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22440.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Freed, Regina
;
Sun, Jeff
;
Brodie, Alan D.
;
Petric, Paul
;
McCord, Marc A.
;
Ronse, Kurt
;
Haspeslagh, Luc
;
Vereecke, Bart
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1859
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Metrics
Views
1859
since deposited on 2021-10-19
1
last week
Acq. date: 2025-10-28
Citations