Demonstration of lithography patterns using reflective e-beam direct write

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Authors
Freed, Regina; Sun, Jeff; Brodie, Alan D.; Petric, Paul; McCord, Marc A.; Ronse, Kurt; Haspeslagh, Luc; Vereecke, Bart
Conference
Alternative Lithographic Technologies III
Title
Demonstration of lithography patterns using reflective e-beam direct write
Publication type
Proceedings paper
Embargo date
9999-12-31
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