Browsing by author "Palombizio, Antonio"
Now showing items 1-2 of 2
-
Effect of inductively coupled electro-magnetic field on bottom oxide etch in a high aspect ratio trench
Sardo, Stefano; Palombizio, Antonio; Redolfi, Augusto; Mannarino, Manuel; Haspeslagh, Luc (2020) -
Effect of inductively coupled electro-magnetic field on bottom oxide etch in a high aspect ratio trench
Sardo, Stefano; Palombizio, Antonio; Redolfi, Augusto; Mannarino, Manuel (2020)