Publication:
Effect of inductively coupled electro-magnetic field on bottom oxide etch in a high aspect ratio trench
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1981 since deposited on 2021-10-29
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Acq. date: 2026-08-09
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Statistics
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1981 since deposited on 2021-10-29
2last month
2last week
Acq. date: 2026-08-09
Citations