Browsing by author "Coia, Cedrik"
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Transient and end silicide phase formation in thin film Ni/polycrystalline-Si reactions for fully-silicided gate applications
Kittl, Jorge; Pawlak, Malgorzata; Torregiani, Cristina; Lauwers, Anne; Demeurisse, Caroline; Vrancken, Christa; Absil, Philippe; Biesemans, Serge; Coia, Cedrik; Detavernier, Christophe; Jordan-Sweet, Jean; Lavoie, Christian (2007)