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Transient and end silicide phase formation in thin film Ni/polycrystalline-Si reactions for fully-silicided gate applications
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1910 since deposited on 2021-10-16
4last month
Acq. date: 2026-01-08
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Views
1910 since deposited on 2021-10-16
4last month
Acq. date: 2026-01-08
Citations