Authors

Kittl, Jorge; Pawlak, Malgorzata; Torregiani, Cristina; Lauwers, Anne; Demeurisse, Caroline; Vrancken, Christa; Absil, Philippe; Biesemans, Serge; Coia, Cedrik; Detavernier, Christophe; Jordan-Sweet, Jean; Lavoie, Christian

Issue

17

Journal

Applied Physics Letters

Volume

91

Title

Transient and end silicide phase formation in thin film Ni/polycrystalline-Si reactions for fully-silicided gate applications

Publication type

Journal article