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Transient and end silicide phase formation in thin film Ni/polycrystalline-Si reactions for fully-silicided gate applications
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1907 since deposited on 2021-10-16
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Acq. date: 2025-12-12
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1907 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2025-12-12
Citations