Publication:
Transient and end silicide phase formation in thin film Ni/polycrystalline-Si reactions for fully-silicided gate applications
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1911 since deposited on 2021-10-16
Acq. date: 2026-03-17
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Statistics
Views
1911 since deposited on 2021-10-16
Acq. date: 2026-03-17
Citations