Browsing by author "Devloo-Casier, K."
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In situ synchrotron based x-ray fluorescence and scattering measurements during atomic layer deposition : Initial growth of HfO2 on Si and Ge substrates
Devloo-Casier, K.; Dendooven, J.; Ludwig, K.F.; Lekens, Geert; D'Haen, Jan; Detavernier, C. (2011)