Authors

Devloo-Casier, K.; Dendooven, J.; Ludwig, K.F.; Lekens, Geert; D'Haen, Jan; Detavernier, C.

ISSN

0003-6951

Issue

23

Journal

Applied Physics Letters

Volume

98

Title

In situ synchrotron based x-ray fluorescence and scattering measurements during atomic layer deposition : Initial growth of HfO2 on Si and Ge substrates

Publication type

Journal article

Embargo date

9999-12-31