Browsing by author "Lee, Ju Suk"
Now showing items 1-2 of 2
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In-line atomic resolution local nanotopography variation metrology for CMP process
Kim, Tae-Gon; Heylen, Nancy; Kim, Soon-Wook; Vandeweyer, Tom; Jo, Ah-jin; Lee, Ju Suk; Ahn, Byoung-Woon; Cho, Sang-Joon; Park, Sang-il; Imer, Bernd; Shmidt, Sebastian (2017) -
In-line metrology for atomic resolution local height variation
Kim, Tae-Gon; Kim, Soon-Wook; Vandeweyer, Tom; Jo, Ah-jin; Lee, Ju Suk; Ahn, Byoung-Woon; Zandiatashbar, Ardavan; Cho, Sang-Joon; Park, Sang-il; Irmer, Bernd; Schmidt, Sebastian (2017)