Browsing by author "Irmer, Bernd"

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Atomic resolution quality control for Fin oxide recess by atomic resolution profiler

Kim, Tae-Gon; Ryu, Heon-Yul; Kenis, Karine; Jo, Ah-jin; Cho, Sang-Joon; Park, Sang-il; Schmidt, Sebastian; Irmer, Bernd (2016)
In-line metrology for atomic resolution local height variation

Kim, Tae-Gon; Kim, Soon-Wook; Vandeweyer, Tom; Jo, Ah-jin; Lee, Ju Suk; Ahn, Byoung-Woon; Zandiatashbar, Ardavan; Cho, Sang-Joon; Park, Sang-il; Irmer, Bernd; Schmidt, Sebastian (2017)