Browsing by author "Gronheid, Roel"
Now showing items 1-2 of 2
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Evolution of lithography-to-etch bias in multi-patterning processes
Panneerchelvam, Prem; Agarwal, Ankur; Huard, Chad M. M.; Pret, Alessandro Vaglio; Mani, Antonio; Gronheid, Roel; Demand, Marc; Kumar, Kaushik; Paolillo, Sara; Lazzarino, Frederic (2022) -
Overlay challenges in 3D heterogeneous integration
Grauer, Yoav; Miller, Andy; La Tulipe, Douglas Charles; Manassen, Amnon; Eisenbach, Shlomo; Bachar, Ohad; Gronheid, Roel (2022)