Browsing by author "Gronheid, Roel"

Evolution of lithography-to-etch bias in multi-patterning processes

Panneerchelvam, Prem; Agarwal, Ankur; Huard, Chad M. M.; Pret, Alessandro Vaglio; Mani, Antonio; Gronheid, Roel; Demand, Marc; Kumar, Kaushik; Paolillo, Sara; Lazzarino, Frederic (2022)

Hotspot discovery and variability analysis for advanced EUV processes

Sah, Kaushik; Chen, Zhijin; Zhang, Yao; Zhang, Liming; Zhang, Cao; Higgins, Craig; Burov, Anatoly; Parsey, Guy; Vukkadala, Pradeep; Gronheid, Roel; Jain, Arpit; Ramini, Ramakanth; Agrawal, Ankur; Sharma, Garima; Cross, Andrew; Roy, Syamashree; Blanco, Victor (2024)

Overlay challenges in 3D heterogeneous integration

Grauer, Yoav; Miller, Andy; La Tulipe, Douglas Charles; Manassen, Amnon; Eisenbach, Shlomo; Bachar, Ohad; Gronheid, Roel (2022)