Browsing by author "Bilodeau, S"
Now showing items 1-2 of 2
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Strained germanium gate-all-around pMOS device demonstration using selective wire release etch prior to replacement metal gate deposition
Witters, Liesbeth; Arimura, Hiroaki; Sebaai, Farid; Hikavyy, Andriy; Milenin, Alexey; Loo, Roger; De Keersgieter, An; Eneman, Geert; Schram, Tom; Wostyn, Kurt; Devriendt, Katia; Schulze, Andreas; Lieten, Ruben; Bilodeau, S; Cooper, E; Storck, Peter; Chiu, Eddy; Vrancken, Christa; Favia, Paola; Vancoille, Eric; Mitard, Jerome; Langer, Robert; Opdebeeck, Ann; Holsteyns, Frank; Waldron, Niamh; Barla, Kathy; De Heyn, Vincent; Mocuta, Dan; Collaert, Nadine (2017) -
Strained germanium gate-all-around PMOS device demonstration using selective wire release etch prior to replacement metal gate deposition
Witters, Liesbeth; Sebaai, Farid; Hikavyy, Andriy; Milenin, Alexey; Loo, Roger; De Keersgieter, An; Eneman, Geert; Schram, Tom; Wostyn, Kurt; Devriendt, Katia; Schulze, Andreas; Lieten, Ruben; Bilodeau, S; Cooper, E; Storck, Peter; Vrancken, Christa; Arimura, Hiroaki; Favia, Paola; Vancoille, Eric; Mitard, Jerome; Langer, Robert; Opdebeeck, Ann; Holsteyns, Frank; Waldron, Niamh; Barla, Kathy; De Heyn, Vincent; Mocuta, Dan; Collaert, Nadine (2017-06)