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Strained germanium gate-all-around PMOS device demonstration using selective wire release etch prior to replacement metal gate deposition
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Strained germanium gate-all-around PMOS device demonstration using selective wire release etch prior to replacement metal gate deposition
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Date
2017-06
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Witters, Liesbeth
;
Sebaai, Farid
;
Hikavyy, Andriy
;
Milenin, Alexey
;
Loo, Roger
;
De Keersgieter, An
;
Eneman, Geert
;
Schram, Tom
;
Wostyn, Kurt
;
Devriendt, Katia
;
Schulze, Andreas
;
Lieten, Ruben
;
Bilodeau, S
;
Cooper, E
;
Storck, Peter
;
Vrancken, Christa
;
Arimura, Hiroaki
;
Favia, Paola
;
Vancoille, Eric
;
Mitard, Jerome
;
Langer, Robert
;
Opdebeeck, Ann
;
Holsteyns, Frank
;
Waldron, Niamh
;
Barla, Kathy
;
De Heyn, Vincent
;
Mocuta, Dan
;
Collaert, Nadine
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2003
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Views
2003
since deposited on 2021-10-24
3
last month
1
last week
Acq. date: 2025-12-16
Citations