Publication:

Strained germanium gate-all-around PMOS device demonstration using selective wire release etch prior to replacement metal gate deposition

Date

2017
Proceedings Paper
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Author(s)

Witters, Liesbeth  
;
Sebaai, Farid  
;
Hikavyy, Andriy  
;
Milenin, Alexey  
;
Loo, Roger  
;
De Keersgieter, An  
;
Eneman, Geert  
;
Schram, Tom  
;
Wostyn, Kurt  
;
Devriendt, Katia  
;
Schulze, Andreas
;
Lieten, Ruben  
;
Bilodeau, S
;
Cooper, E
;
Storck, Peter
;
Vrancken, Christa  
;
Arimura, Hiroaki  
;
Favia, Paola  
;
Vancoille, Eric  
;
Mitard, Jerome  
;
Langer, Robert  
;
Opdebeeck, Ann  
;
Holsteyns, Frank  
;
Waldron, Niamh  
;
Barla, Kathy  
;
De Heyn, Vincent  
;
Mocuta, Dan
;
Collaert, Nadine  

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2008 since deposited on 2021-10-24
Acq. date: 2026-09-19

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2008 since deposited on 2021-10-24
Acq. date: 2026-09-19

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