Browsing by author "Salimullah, M.M."

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    • Plasma enhanced atomic layer deposited Ru for MIMCAP applications 

      Swerts, Johan; Salimullah, M.M.; Popovici, Mihaela Ioana; Kim, Min-Soo; Pawlak, Malgorzata; Delabie, Annelies; Schaekers, Marc; Tomida, Kazuyuki; Kaczer, Ben; Opsomer, Karl; Vrancken, Christa; Debusschere, Ingrid; Altimime, Laith; Kittl, Jorge; Van Elshocht, Sven (2011)