Publication:

Plasma enhanced atomic layer deposited Ru for MIMCAP applications

Date

2011

Proceedings Paper

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Files

23284.pdf 414.38 KB

Author(s)

;

Salimullah, M.M.

;

Popovici, Mihaela Ioana

;

;

Pawlak, Malgorzata

;

Delabie, Annelies

;

Schaekers, Marc

;

Tomida, Kazuyuki

;

;

;

Vrancken, Christa

;

Debusschere, Ingrid

;

Altimime, Laith

;

;

Van Elshocht, Sven

Metrics

1814 since deposited on 2021-10-19

Acq. date: 2025-12-18