Browsing by author "Li, Xuefa"

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The nucleation of ALD HfO2 films, and evolution of their morphology, studied by grazing incidence small angle x-ray scattering by synchroton radiation

Green, Martin L.; Li, Xuefa; Wang, Jin; Allen, Andrew J.; Delabie, Annelies; Puurunen, Riikka; Brijs, Bert; Vanhaeren, Danielle (2004)