Publication:
The nucleation of ALD HfO2 films, and evolution of their morphology, studied by grazing incidence small angle x-ray scattering by synchroton radiation
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1881 since deposited on 2021-10-15
Acq. date: 2025-12-09
Citations
Metrics
Views
1881 since deposited on 2021-10-15
Acq. date: 2025-12-09
Citations