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The nucleation of ALD HfO2 films, and evolution of their morphology, studied by grazing incidence small angle x-ray scattering by synchroton radiation
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1880 since deposited on 2021-10-15
Acq. date: 2025-10-24
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Views
1880 since deposited on 2021-10-15
Acq. date: 2025-10-24
Citations