Publication:
The nucleation of ALD HfO2 films, and evolution of their morphology, studied by grazing incidence small angle x-ray scattering by synchroton radiation
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1888 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2026-08-08
Citations
Statistics
Views
1888 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2026-08-08
Citations