Publication:
The nucleation of ALD HfO2 films, and evolution of their morphology, studied by grazing incidence small angle x-ray scattering by synchroton radiation
Date
| dc.contributor.author | Green, Martin L. | |
| dc.contributor.author | Li, Xuefa | |
| dc.contributor.author | Wang, Jin | |
| dc.contributor.author | Allen, Andrew J. | |
| dc.contributor.author | Delabie, Annelies | |
| dc.contributor.author | Puurunen, Riikka | |
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Vanhaeren, Danielle | |
| dc.contributor.imecauthor | Delabie, Annelies | |
| dc.contributor.imecauthor | Vanhaeren, Danielle | |
| dc.contributor.orcidimec | Vanhaeren, Danielle::0000-0001-8624-9533 | |
| dc.date.accessioned | 2021-10-15T13:39:18Z | |
| dc.date.available | 2021-10-15T13:39:18Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8981 | |
| dc.source.conference | Atomic Layer Deposition Conference | |
| dc.source.conferencedate | 16/08/2004 | |
| dc.source.conferencelocation | Helsinki Finland | |
| dc.title | The nucleation of ALD HfO2 films, and evolution of their morphology, studied by grazing incidence small angle x-ray scattering by synchroton radiation | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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