Browsing by author "Baranov, Gleb"
Now showing items 1-2 of 2
-
Roughness study of a template for hetero-integrated FinFET
Baranov, Gleb; Milenin, Alexey; Baklanov, Mikhaïl (2015) -
Study of LER as a function of Si fin etching step in replacement FinFET process (title translated).
Baranov, Gleb; Milenin, Alexey; Baklanov, Mikhaïl (2016)