Publication:
Study of LER as a function of Si fin etching step in replacement FinFET process (title translated).
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1836 since deposited on 2021-10-23
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Acq. date: 2026-08-05
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Statistics
Views
1836 since deposited on 2021-10-23
1last month
1last week
Acq. date: 2026-08-05
Citations