Publication:
Study of LER as a function of Si fin etching step in replacement FinFET process (title translated).
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1835 since deposited on 2021-10-23
2last month
Acq. date: 2026-06-06
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Views
1835 since deposited on 2021-10-23
2last month
Acq. date: 2026-06-06
Citations