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Roughness study of a template for hetero-integrated FinFET
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Authors
Baranov, Gleb
;
Milenin, Alexey
;
Baklanov, Mikhaïl
Conference
Plasma Etch and Strip in Microtechnology - PESM
Title
Roughness study of a template for hetero-integrated FinFET
Publication type
Meeting abstract
Embargo date
9999-12-31
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