Browsing by author "Suzuki, Tatsunobu"
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Selective Si Etchant for Gate-All-Around Transistors with Si1-xGex Channel
Harada, Ken; Suzuki, Tatsunobu; Asano, Mari; Kakeshita, Kan; Puttarame Gowda, Pallavi; Oniki, Yusuke; Altamirano Sanchez, Efrain (2021) -
Si1-xGex selective etchant for gate-all-around transistors
Harada, Ken; Suzuki, Tatsunobu; Kusano, Tomohiro; Takeshita, Kan; Oniki, Yusuke; Altamirano Sanchez, Efrain; Struyf, Herbert; Holsteyns, Frank (2021)