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Selective Si Etchant for Gate-All-Around Transistors with Si1-xGex Channel
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Authors
Harada, Ken
;
Suzuki, Tatsunobu
;
Asano, Mari
;
Kakeshita, Kan
;
Puttarame Gowda, Pallavi
;
Oniki, Yusuke
;
Altamirano Sanchez, Efrain
ISSN
n/a
Conference
Surface Preparation and Cleaning Conference (SPCC)
Journal
n/a
Title
Selective Si Etchant for Gate-All-Around Transistors with Si1-xGex Channel
Publication type
Meeting abstract
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Version
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Date
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2
20.500.12860/38514.2
*
2022-02-10T13:14:35Z
validation by library/open access desk
1
20.500.12860/38514
2021-12-01T15:58:48Z
*Selected version
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